Process Technology

Wet Process Heating and Cooling Equipment

High Purity Products


Process Technology's high purity products for wet process manufacturing applications include: fluoropolymer and quartz UPDI water heaters, inline chemical heaters, solvent heaters, nitrogen heaters, electric immersion heaters, inline heat exchangers, and high temperature filter chambers.  Industries served include Semiconductor, FPD, MEMS, Nanotechnology, Photovoltaic (solar cell), LCD, Biomedical and Pharmaceutical.  These products are assembled in a Class 100 (ISO 5) cleanroom to exacting standards. 

Process Technology has a worldwide install base as well as an extensive distributor and service network for product support.  In addition to our standard products many custom products engineered specifically for your application are available.

DI WATER HEATERS

Designed for the ultra pure demands of high purity industries, Process Technology offers a full line de-ionized water heaters designed for your most demanding applications.  Sizes range from 3,000 watts up to 260,000 watts.  The patented designs incorporate unique features for superior thermal response.  The heaters are available in quartz or fluoropolymer wetted parts for the most demanding high purity applications.  All high purity heaters are assembled in an ISO5 (Class 100) cleanroom.  Also available are heaters made from titanium wetted parts for less critical, but still virtually contamination free performance.  Many custom configurations are available. 

Available DACTM software provides outstanding temperature stability for demanding flow/temperature requirements.  This outstanding control software is available for any of our DI water heaters.

These heaters are available with UL/ETL, CE and SEMI S2/S3 certifications. 

Lufran Fluoropolymer Water Heaters: One of the most popular high purity water heaters in the world. Proven technology for UPDI heating applications and suitable for the most stringent high purity specifications. Constructed with all PTFE and PVDF wetted parts. Patented "purged" resistive element design offers exceptional MTBF of ten years. Third party certified to SEMI and UL standards, and CE compliant. Standard patented DACTM software provides accurate temperature control for different flow and temperature requirements. Sizes available up to 312kW.

H2OT SHOTTM Quartz Water Heaters: High purity water heaters for demanding applications. Resistive element design for maximum service life. Ultra pure quartz wetted parts for superior cleanliness. Third party certified to SEMI and UL standards, and CE compliant. Standard patented DACTM software provides accurate temperature control for different flow and temperature requirements. Sizes available up to 72kW.

TytanTM Water Heaters: This heater is a low cost, high quality alternative for noncritical DI and RO water heating applications. Constructed with titanium elements and wetted parts for exceptionally long life. Third party certified to UL standards. Semi and CE compliant configurations available upon request. PID control standard. Sizes available up to 144kW, wall mounted up to 72kW.

 

INLINE CHEMICAL HEATERS

Inline chemical heaters are used in wet process manufacturing applications were inline heating is preferred over immersion heating methods.  Process Technology inline heaters are manufactured in fluoropolymer and high purity quartz materials.  Sizes up to 18,000 watts.  A large variety of standard and custom configurations are available.  Applications include temperatures up to 180 degrees centigrade.

TIH Series, Fluoropolymer Chemical Heaters: Durable inline heaters for virtually any chemistry. For use in processes up to 180°C (356°F). Third party certified to SEMI and UL standards, and CE compliant. Several plumbing configurations offered. Vertical mounting standard, optional horizontal configuration available. Model with cooling coil combination also available. Sizes up to 18kW.

H2OT SHOTTM Quartz Chemical Heaters: Constructed with all ultra pure quartz wetted parts. Excellent choice for SC1, SC2, and other quartz compatible applications. For use in processes up to 180°C (356°F). Exceptionally easy maintenance. Several plumbing configurations available for maximum flexibility. Third party certified to SEMI and UL standards, and CE compliant. Sizes available up to 12kW.

 

SOLVENT/NITROGEN HEATERS

SoltaN2TM Inline Solvent/Gas Heaters: Electric heater with stainless steel flow path designed for safe, indirect heating of many solvents including but not limited to: NMP, EKC 265, EKC 830, ACT 690, and ACT 97. Also heats inert gases (nitrogen, etc.) up to 200°C (392°F). Standard and high flow versions available. Suitable for class 1, division 2 hazardous environment. Sizes available up to 18kW.

 

ELECTRIC IMMERSION HEATERS

Fluoropolymer heaters for chemical baths are available in sizes up to 6,000 watts.  Two primary styles are available: The TFB/TFW series offers an extremely small package size and a patented “purge” system that provides unique safety features and extremely long element life.  The HX series is fully grounded heater of extremely rugged construction.  Control systems are available for all immersion heaters.

TFB series, Immersion Heaters: Fluoropolymer immersion heaters for chemical bath applications. Constructed with our exclusive patented N2 "purged" elements for extended service life. Custom configured to fit your tank size. High efficiency in a compact design, and an excellent alternative for replacing strip heaters on quartz tanks. Two basic configurations available: TFB for bottom heater applications, and TFW for inside tank wall requirements. Small package size for fast heat-up. Sizes available up to 15kW.

HX series, Immersion Heaters: Fluoropolymer immersion heaters for chemical bath applications. Metal ground for safety. Durable design for longevity, and optional patented N2 "purged" elements available for extended service life. Standard thick wall sheath construction. Three basic configurations offered: HXRL for low profile bottom heater applications, HXOL for higher wattage requirements, and HXSL for inside tank wall specifications. Standard and custom configurations available. Sizes up to 6kW.

 

HEAT EXCHANGERS

Inline fluoropolymer heat exchangers offer unsurpassed chemical resistance and customized sizing specific to your application.   Stainless steel spiral plate heat exchangers offer compact size and excellent thermal exchange efficiencies.  Virtually any chemical application can be sized with the help of our excellent engineering department.  Process Technology also offers a wide selection of immersion style heat exchangers in a larger variety of materials and configurations in our industrial product offerings.

XC series, In-line Fluoropolymer Heat Exchangers: Rugged inline heat exchangers ideal for one pass cooling of chemicals dumping to waste stream. This product is also appropriate for heating applications. Eliminates high costs associated with water aspiration. PP or PVDF housing and fluoropolymer tubing. Custom configured for your application. Custom sizes available, please contact factory for sizing assistance.

TherMax2 Spiral Plate Heat Exchangers: Compact, low carbon stainless steel heat exchanger design is ideal for solvent heating or cooling. Enhanced turbulence for high efficiency thermal exchange while maintaining minimal pressure drop. All welded construction. Seven sizes available, up to 15 square feet (1.4 m2).

Off-the-Shelf and Custom-Built Coils and Heat Exchangers

 

HIGH TEMPERATURE FILTERS

LTFH Series, Filter Housing: Reusable high temperature filter housing made of heavy wall PTFE for the most demanding applications. Capable of applications up to 180°C (356°F). Utilizes standard single, open-end (flat end) filter cartridges with double 222 o-ring seal. Three sizes available: 10 inch/70mm, 20 inch/70mm, and 10 inch/83mm cartridge sizes.

For more information on High Purity products, or any other Process Technology product, please contact our offices (toll free within the United States or Canada) for the distributor nearest you, or visit our contact page.

U.S./Canada: 800-621-1998
Worldwide: 440-974-1300


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