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Wet Process Heating and Cooling Equipment |
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The Process Technology quartz IR heater utilizes only high-purity quartz wetted surfaces to ensure no process contamination. IR heating lamps provide responsive heating.
With an all-quartz construction, a wide range of SC-1 and SC-2 fluids can be heated including hydrochloric-peroxide, ammonium-peroxide, sulfuric-peroxide, phosphoric acid, sulfuric acid and ultrapure deionized water. A sealed, all fluoropolymer (PTFE) containment housing provides a corrosion-proof, maintenance-free installation and secondary containment. The housing vent connection permits excess heat to be directed out of the wet bench.
Over temperature protection, GFP, SEMI S2 safety guidelines and optional leak detection ensures efficient, safe heater operation.
Combine all of these features in a package occupying less than a 12 inch by 12 inch by 24 inch cube, and you have the ideal heater for your wet process tool or other point-of-use ultrapure heater application.
FEATURES and BENEFITS:
- Outstanding Cleanliness: Ultra-clean performance is achieved through the use of 100% high-purity quartz construction. No ionic or bacterial contamination.
- Reliable: Our patented cooling system significantly extends heater element life versus conventional designs. With cooling air directed only where it is needed (the lamp sockets), the heater uses minimal purge gas and heater efficiencies are maximized.
- Low Cost of Ownership (COO): Heating element can be field replaced without disturbing the plumbing connections or affecting the integrity of the chemistry, resulting in significantly lower costs over the life of the heater and the chemicals.
- Excellent Responsiveness: Halogen lamps provide instantaneous start-up and rapid response with excellent temperature stability under varying flow rates.
- Low Pressure Drop: Unique construction has minimal pressure drop for high-circulation applications.
- Easy Maintenance with Minimal Down Time: Plug-in heater element is easily replaced in minutes. Fluid connections remain intact, eliminating the need for system re-qualification.
- "Safe Process" Design: The heating element is isolated from the process to virtually eliminate the potential for catastrophic process contamination.
- Secondary Containment: The PTFE housing acts as a maintenance-free secondary containment vessel to help protect the environment from chemical spills. Leak detection available as an option.
- Compact Size: Space-conscious design minimizes footprint requirements.
- No Dead Zones: Tangential flow pattern eliminates stagnant zones in the heater. The heater is self-draining and self-venting (upon proper installation).
- No O-Rings: process contamination associated with o-rings is eliminated. Leak-free operation assured.
Outline drawing of same side inlet/outlet
Outline drawing of opposite side inlet/outlet
Lamp sub-assembly insertion diagram
Chemistries, processes and applications
DOWNLOAD THE INFORMATION SHEET
DOWNLOAD THE INLINE CHEMICAL HEATER SPECIFICATION SHEET
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For more information on this, or any other Process Technology product, please contact our offices (toll free within the United States or Canada) for the distributor nearest you, or visit our contact page.
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